Semiconductors > Vacuum applications
High precision sensor solutions for vacuum applications

High precision solutions for vacuum applications

Sensors with extraordinary design features are necessary for direct use in high, ultra-high and ultra-pure vacuums. For this purpose we offer screw-in versions with a sealing function as well as high precision optoelectronic sensors for installation in high-vacuum. The signals are brought out of the vacuum chamber using a feed-through of electrical cables.

Application examples

Wafer centering in the load lock
Presence checking through a housing channel on the vacuum chamber
Presence and position detection of wafers "on blade"