Wafer processing
Reliable position detection in wafer processing

Reliable wafer processing – step by step

Our sensors ensure that wafers are reliably transported through every single one of the sensitive process steps while they are processed. With precise presence checking, position sensing and position detection, the sensors ensure that the wafers are transported smoothly from lithography to dry etching and finally to cleaning. Particularly small form factors also enable integration of the sensors into the robot. This allows us to guarantee reliable wafer detection, even in tight installation spaces.

Application examples

Wafer presence check
Wafer detection integrated in the end effector
Linear position detection
FOUP presence check
Position detection with inductive low-voltage sensors