We assist in process security
Sensors from Balluff with their extraordinary design features let you use them directly in a vacuum. For example during alignment on the fly when the wafer is centered in the vacuum lock or when you need to check it for presence.
We offer thread-in versions with a sealing function as well as sensors for installation directly in high vacuum. Their signals are reliably brought out through electrical cables via a cable fitting. And take special note: Since we use outgassing-optimized materials for the sensor, your process remains secure. If requested we can also produce the sensors in materials you specify.