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Carrier handling

Exact positioning without contact

Exact positioning without contact

Balluff systems support precise and efficient carrier handling – whether it is an FOUP or SMIF pod. When the carrier is transported fully automatically our systems monitor the movements of the AMHS. With extreme reliability, both over short distances with RGVs or long distances with OHVs.

At the same time our non-contact systems provide exact positioning. Your wafers are reliably transported for each and every processing step. Abrasion and splitting are not a problem.

Balluff systems also provide consistent traceability. They ensure that the carrier position is documented in real time.

Application examples