High precision solutions for vacuum applications
Sensors with extraordinary design features are necessary for direct use in high, ultra-high and ultra-pure vacuums. For this purpose we offer screw-in versions with a sealing function as well as high precision optoelectronic sensors for installation in high-vacuum. The signals are brought out of the vacuum chamber using a feed-through of electrical cables.
Our BOH optoelectronic sensors offer one variant for the implementation of a reference light barrier for wafer centering. They are available in a screw-in version made of rugged stainless steel housing with a sealing function and operate via micro-optics with a small light spot. You can comfortably make fine adjustments via an external amplifier.
Our BOH diffuse sensors or through-beam sensors with integrated micro-optics, which we would gladly tailor to your individual needs, are available to you as an alternative.
Our BOH optoelectronic sensors reliably detect the presence and position of the wafers "on blade". Without a dead zone. Their ultra-flat installation height permits space-saving integration into your system.
Balluff BOH optoelectronic sensors make it possible to reliably check the presence of wafers, even through the narrow housing channel on the vacuum chamber. They have micro-optics with a small light spot. We implement the sealing function based on your individual design specifications.