Presence and position detection of wafers "on blade"

Two alternative reference light barriers for load-lock systems

The solution

Our BOH optoelectronic sensors reliably detect the presence and position of the wafers "on blade". Without a dead zone. Their ultra-flat installation height permits space-saving integration into your system.

The features

  • Space-saving ultra-flat design (1.7 mm)
  • No dead zone
  • PTFE cable optimized for outgassing
  • Simple long-distance adjustment thanks to external amplifier
Presence and position detection of wafers "on blade"
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Industry team

Do you have questions? Would you like a consultation? Our industry team looks forward to hearing from you.