High precision sensor solutions for vacuum applications
High precision sensor solutions for vacuum applications

High precision solutions for vacuum applications

Sensors with extraordinary design features are necessary for direct use in high, ultra-high and ultra-pure vacuums. For this purpose we offer screw-in versions with a sealing function as well as high precision optoelectronic sensors for installation in high-vacuum. The signals are brought out of the vacuum chamber using a feed-through of electrical cables.

Application examples

  • Wafer centering in the load lock

    Two alternative reference light barriers for load-lock systems

    The solution – variant 1

    Our BOH optoelectronic sensors offer one variant for the implementation of a reference light barrier for wafer centering. They are available in a screw-in version made of rugged stainless steel housing with a sealing function and operate via micro-optics with a small light spot. You can comfortably make fine adjustments via an external amplifier.

    The features

    • Screw-in version
    • Rugged stainless steel housing with sealing function
    • Micro-optics with small light spot
    • For vacuum applications down to 1x10-9 mbar
    • Simple long-distance adjustment thanks to external amplifier

    The solution – variant 2

    Our BOH diffuse sensors or through-beam sensors with integrated micro-optics, which we would gladly tailor to your individual needs, are available to you as an alternative.

    The features

    • Integrated micro-optics for your individual frame
    • For vacuum applications down to 1x10-9 mbar
    Reference light barrier for wafer centering in the load lock
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    Industry team

    Do you have questions? Would you like a consultation? Our industry team looks forward to hearing from you.

  • Presence and position detection of wafers "on blade"

    Two alternative reference light barriers for load-lock systems

    The solution

    Our BOH optoelectronic sensors reliably detect the presence and position of the wafers "on blade". Without a dead zone. Their ultra-flat installation height permits space-saving integration into your system.

    The features

    • Space-saving ultra-flat design (1.7 mm)
    • No dead zone
    • PTFE cable optimized for outgassing
    • Simple long-distance adjustment thanks to external amplifier
    Presence and position detection of wafers "on blade"
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    Industry team

    Do you have questions? Would you like a consultation? Our industry team looks forward to hearing from you.

  • Presence checking through a housing channel on the vacuum chamber

    Reliable wafer detection - even in extremely tight conditions

    The solution

    Balluff BOH optoelectronic sensors make it possible to reliably check the presence of wafers, even through the narrow housing channel on the vacuum chamber. They have micro-optics with a small light spot. We implement the sealing function based on your individual design specifications.

    The features

    • Micro-optics with small light spot
    • Rugged stainless steel housing with sealing function according to individual design specifications
    • For vacuum applications down to 1x10-9 mbar
    • Simple long-distance adjustment thanks to external amplifier
    Reliable wafer detection - even in extremely tight conditions
    Find suitable products Download

    Industry team

    Do you have questions? Would you like a consultation? Our industry team looks forward to hearing from you.