Reliable position detection in wafer processing
Reliable position detection in wafer processing

Reliable wafer processing – step by step

Our sensors ensure that wafers are reliably transported through every single one of the sensitive process steps while they are processed. With precise presence checking, position sensing and position detection, the sensors ensure that the wafers are transported smoothly from lithography to dry etching and finally to cleaning. Particularly small form factors also enable integration of the sensors into the robot. This allows us to guarantee reliable wafer detection, even in tight installation spaces.

Application examples

  • Wafer presence check

    Two reliable variants for presence checking

    The solution – variant 1

    Our BCS capacitive sensors have a very compact installation height of 2.5 mm with a diameter of 18 mm. This makes it possible to perfectly integrate them. Long-distance adjustment is possible thanks to the external amplifier.

    The features

    • Very compact installation height (2.5 mm, 18 mm diameter)
    • Highly flexible, 3-wire single-ended cordset
    • Stainless steel disk, sensing surface made of PTFE
    • Simple long-distance adjustment thanks to external amplifier

    The solution – variant 2

    Our BOH optoelectronic sensors have an extremely compact installation height of only 1.7 mm. They can be integrated perfectly. And can easily be adjusted from a distance via an external amplifier.

    The features

    • Very compact installation height (1.7 mm)
    • Highly flexible, 3-wire single-ended cordset
    • Stainless steel housing
    • Infrared light
    • Vacuum-compatible
    • Simple long-distance adjustment thanks to external amplifier
    Wafer presence check
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  • Wafer detection integrated in the end effector

    High-precision detection with an exact light spot

    The solution

    Our BOH optoelectronic sensors are integrated directly into the end effector and guarantee high-precision wafer detection there. This is above all ensured by the light barrier with micro-optics as well as the highly exact light spot.

    The features

    • Light barrier with micro-optics
    • Highly exact light spot
    • High-flex, extreme load capacity sensor cable
    Wafer detection integrated in the end effector
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  • Linear position detection

    Measurement with maximum precision and speed

    The solution

    Our BML magnetically encoded displacement transducers and angle measurement systems are the perfect solution for linear position detection: The measurement system measures fast and highly precisely, with a resolution of up to 1 μm and system accuracy of up to +/–7 μm. The system operates without contact and therefore entirely wear-free.

    The features

    • Maximum precision (resolution up to 1 μm) and speed
    • System accuracy of up to +/–7 µm
    • Wear-free because of contact-free operating principle
    • Ideal for distances up to 48 m
    Maximum precision and speed in wafer processing
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  • FOUP presence check

    Reliable monitoring with LED technology

    The solution

    Our BOH optoelectronic sensors are equipped with LED technology and individual focus and are optionally available as a light barrier or diffuse sensor. Due to their particularly flat design, you can integrate them into your process chain to save space.

    The features

    • LED technology
    • Space-saving thanks to particularly flat design
    • Individual focus
    • Available as a light barrier or diffuse sensor
    FOUP presence check with LED technology
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  • Position detection with inductive low-voltage sensors

    Reliable detection with NAMUR sensors

    The solution

    With our BES inductive NAMUR sensors you are on the safe side when processing wafers: The sensor follows the NAMUR recommendations and reliably detects cable breaks and short-circuits. Due to its low current consumption, it only generates minimal self-heating. Continuous use is therefore possible without any problems.

    The features

    • Minimum self-heating thanks to low current consumption
    • Ideal for continuous use
    • Reliably detects cable breaks and short-circuits
    • Sizes D4, D6,5, M5, M8 and 5x5
    Reliable detection with NAMUR sensors in wafer processing
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    Industry team

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