Two alternative reference light barriers for load-lock systems
Our BOH optoelectronic sensors reliably detect the presence and position of the wafers "on blade". Without a dead zone. Their ultra-flat installation height permits space-saving integration into your system.
- Space-saving ultra-flat design (1.7 mm)
- No dead zone
- PTFE cable optimized for outgassing
- Simple long-distance adjustment thanks to external amplifier