Leak monitoring in the production of semiconductors
Leak monitoring in the production of semiconductors

Smart technology for secure processes

The requirements for safety and stability in the production of semiconductors are extremely high. With our reliable components, we contribute to safeguarding your processes. For example, by ensuring that fill levels are always in the ideal range. And that you detect leaks on time.

Our capacitive BCS sensors detect both conductive and non-conductive materials such as liquids, granules and powders – in direct contact or through container walls. With Smart Level technology, our capacitive sensors even detect for the first time concentrated acids and bases through plastic containers with walls up to 10 mm thick.

Balluff sensors are easy to install and can also be integrated into existing systems without any problems. This ensures that your processes take place not only reliably, but also efficiently and economically.

Application examples

  • Contact-free detection of levels through container walls

    Contact-free and reliable detection through container walls

    The solution

    Our BCS capacitive sensors detect levels of acids, bases or ultrapure water without contact through the container wall of your plastic tanks. Our Smart Level technology compensates for moisture, foam and deposits of all kinds as they work.

    The sensors are easy to install and can optionally be attached using adhesives, screws or cable ties.

    The features

    • Detection of acids, bases and ultrapure water
    • Walls up to 10 mm thick
    • No bypasses required
    • Reduction in installation and material costs
    • Foam and deposit compensation using Smart Level technology
    • Easy, flexible installation
    Contact-free fill level detection in the semiconductor industry
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    Industry team

    Do you have questions? Would you like a consultation? Our industry team looks forward to hearing from you.

  • Fill level sensing at bypass pipes

    Contact-free and reliable detection directly at the pipe

    The solution

    Our BCS capacitive sensors detect fill levels of acids, bases or ultrapure water without contact directly at bypass pipes. Balluff Smart Level technology compensates for moisture, foam and deposits of all kinds as they work. The sensors can be installed quickly and easily with cable ties. This saves installation work and costs.

    The features

    • Detection of acids, bases and ultrapure water
    • Foam and deposit compensation using Smart Level technology
    • Fast, easy and cost-effective mounting with cable ties
    • IO-Link variant on request
    Contact-free fill level sensing at bypass pipes
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    Industry team

    Do you have questions? Would you like a consultation? Our industry team looks forward to hearing from you.

  • Fill level detection in contact with the media in tanks

    Reliably detect highly conductive process fluids

    The solution

    In your tanks, our BCS capacitive sensors detect highly conductive process fluids such as acids, bases and ultrapure water. The Smart Level sensors compensate for moisture, foam and deposits of all kinds as they work.

    The features

    • Non-flush mounting
    • PTFE housing
    • Foam and deposit compensation using Smart Level technology
    Reliably detect highly conductive process fluids
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    Industry team

    Do you have questions? Would you like a consultation? Our industry team looks forward to hearing from you.

  • Contact-free fill level measurement in tanks

    Continuous and highly accurate detection of the fill level

    The solution

    Our BTL magnetostrictive linear position sensors detect the fill level of your tanks without contact and with high precision in the μm range. The measurement section is protected by a pressure-rated stainless steel tube. Balluff thereby guarantees you absolute reliability and measurement results of the highest possible quality.

    The features

    • Highly accurate level measurement in the µm range (absolute)
    • Ability to measure separating layers
    • Stainless steel BTL magnetostrictive linear position sensor (PFA coating on request)
    • Pressure-resistant
    Continuous and highly accurate detection of the fill level in tanks
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    Industry team

    Do you have questions? Would you like a consultation? Our industry team looks forward to hearing from you.

  • Leak monitoring of overflow chambers

    Reliably detect even the smallest amounts

    The solution

    Our BCS capacitive sensors can detect the smallest leak amounts at the bottom of baths. They thereby guarantee the reliable leak monitoring of your overflow chambers. The supplied bracket makes installing the sensors quick and easy.

    The features

    • Simple mounting using supplied bracket (2 mm spacing)
    • Chemical resistance
    • IO-Link version available
    Reliable leak monitoring of overflow chambers
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    Industry team

    Do you have questions? Would you like a consultation? Our industry team looks forward to hearing from you.