Wafer detection integrated in the end effector

Wafer detection integrated in the end effector

High-precision detection with an exact light spot

The solution

Our BOH optoelectronic sensors are integrated directly into the end effector and guarantee high-precision wafer detection there. This is above all ensured by the light barrier with micro-optics as well as the highly exact light spot.

The features

  • Light barrier with micro-optics
  • Highly exact light spot
  • High-flex, extreme load capacity sensor cable
Wafer detection integrated in the end effector
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Industry team
Do you have questions? Would you like a consultation? Our industry team looks forward to hearing from you.