Wafer processing
Wafer processing

Reliable wafer presence detection

Balluff sensors ensure that wafers are reliably detected so that they can be transported through every process step during manufacturing. With precise presence checking, position sensing and position detection, the sensors ensure that the wafers are transported smoothly from lithography to dry etching and finally to cleaning. Particularly small form factors also enable integration of the sensors into the robot end effector.

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Application examples

  • Wafer presence verification

    Reliable options for wafer detection

    The solution

    Balluff capacitive sensors have a very compact height of 2.5 mm with a diameter of 10 mm. enabling them to be easily mounted into the robot end efector. Remote mounted amplifiers with multiple control options and the ability to remote teach makes integration quick and easy.

    The features

    • Very compact installation height (2.5 mm, 10 mm diameter)
    • Stainless steel disk, sensing surface made of PTFE
    • Remote amplifier enables quick easy setup

    The solution – variant 2

    Our BOH optoelectronic sensors have an extremely compact installation height of only 1.7 mm. They can be integrated perfectly. And can easily be adjusted from a distance via an external amplifier.

    The features

    • Very compact installation height (2.5 mm, 18 mm diameter)
    • Highly flexible, 3-wire single-ended cordset
    • Stainless steel housing
    • Infrared light
    • Vacuum-compatible
    Wafer presence check
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  • Wafter detection integrated in the end effector

    Precise wafer detection with photoelectrics

    The solution

    Balluff's micro-optic MICROmote photoelectric sensors can be integrated directly into the end effector and guarantee high-precision wafer detection. Small sensing heads and "wired fibers" allow mounting in space limited locations with no minimum bending radius like conventional fiber optics. The remote amplifiers have multiple teach options that can solve the most difficult applications and a variety of outputs that makes integration into control systems quick and easy.

    The features

    • Sensor heads with small footprint for space limited applications
    • Precise switch points for high accuracy
    • Focused narrow light beams
    Wafter detection integrated in the end effector
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  • Linear position detection

    Measurement with maximum precision and speed

    The solution

    Balluff's magnetically coded position and angle measurement systems can ensure precise positioning so that wafers are in the correct position during manufacturing. Available in either linear or rotary configurations, the sensing tape and head are incredibly compact providing versatility in mounting. In addition, output signals are available as either incremental or absolute supporting high dynamic position or angle measurement tasks in real-time systems.

    The features

    • Very accurate, up to ± 7 µm with resolutions down to 1 µm
    • Very fast, speeds up to 20 m/sec
    • Location is always known with absolute output signal
    Maximum precision and speed in wafer processing
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  • FOUP presence verification

    Precise reliable detection

    The solution

    Balluff's micro-optic MICROmote photoelectric sensors can easily solve these critical applications. With sensing heads as small as 2mm and "wired fibers" with no minimum bending radius these miniature sensors can easily fit in the smallest of spaces. The remote amplifiers have multiple teach options that can solve the most difficult applications and a variety of outputs that makes integration into control systems quick and easy.

    The features

    • MICROmote sensing heads provide a better alternative to fiber optic sensors
    • Sensing beam angle and shape are designed for accurate presence verification
    • Small-scale sensing heads provides more mounting solutions
    FOUP presence check with LED technology
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  • Position detection with inductive sensors

    The shortest fully-integrated inductive sensors on the market

    The solution

    Balluff's miniature inductive sensors are easy to install and can be fully integrated in space limited assemblies such as linear slides, valves and actuators. As a result, position sensing is now possible where there was never before space for a sensor resulting in assemblies being reduced in size. Their extremely low mass enables sudden acceleration and deceleration on highly dynamic, fast-moving equipment without adding excessive inertial load.

    The features

    • Ultra-short housing
    • Low weight (0.7 g) for sudden acceleration and deceleration
    • Stainless steel housing for rugged applications
    Reliable detection with NAMUR sensors in wafer processing
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    Have any questions? Please give us a call or send us an email. We look forward to hearing from you.