Detecting robot position
Are you using multiple load ports? Or multiple process chambers? Then use our high-precision magnetic encoder systems to reliably monitor the movement of your robot units. These non-contact distance measuring systems continuously monitor the robot position. And the magnetic tape can be trimmed to exactly the length you need. This means you can use the system for modules with varying numbers of load ports.
- Non-contact, i.e. no abrasion or splitting
- Flexible: Up to 48 m of magnetic tape can be trimmed to your requirements