Semiconductor Industry > Wafer handling
High precision even between the process steps

High precision even between the process steps

When it comes to wafer handling in the EFEM module, such as on the end effector or the pre-aligner, Balluff gives you high precision. Only extreme accuracy allows wafers to be exactly positioned and reliably transported for each individual processing step.

Our sensors and systems are available in compact form factors to easily meet demanding requirements for machine integration. When conditions are especially challenging – after all, every end effector is different – we can also tailor our technology to your individual requirements.

The non-contact measuring principles prevent abrasion, so that the cleanroom class can be maintained throughout the entire process. Use reliable monitoring of wafer handling and secure your process.

Application examples

Detecting robot position
Monitoring robot rotation
Wafer pre-alignment
Check for wafer presence on end-effectors
Check for wafer presence on end-effectors
Checking wafer position on the end effector
Reliable wafer mapping
Tracking wafer frames