Semiconductor Industry > Wafer processing
Reliable processing in chemical surroundings

Reliable processing in chemical surroundings

To meet the special challenges of semiconductor production, Balluff offers you optimal solutions for processes in wet chemistry. Special PTFE housings let you monitor levels – such as when etching, cleaning the wafers or coating and developing in lithography. Our temperature sensors then ensure that the process temperature is correct. Because these contacting sensors let you reliably monitor temperatures in wafer processing.

With our sensors you also control the valve stroke, so that you can produce homogeneous and ideal coats in deposition.

Application examples

Non-contact detection of levels through the container wall
Monitor levels without contact on by-pass tubes
Detect process fluids with media contact
Continuously monitor the level without contact
Directly monitor leakage
Get the wafer temperature at each process step
Reliably monitor flow valves