Reliable wafer presence detection
Balluff sensors ensure that wafers are reliably detected so that they can be transported through every process step during manufacturing. With precise presence checking, position sensing and position detection, the sensors ensure that the wafers are transported smoothly from lithography to dry etching and finally to cleaning. Particularly small form factors also enable integration of the sensors into the robot end effector.
Balluff capacitive sensors have a very compact height of 2.5 mm with a diameter of 10 mm. enabling them to be easily mounted into the robot end efector. Remote mounted amplifiers with multiple control options and the ability to remote teach makes integration quick and easy.
Our BOH optoelectronic sensors have an extremely compact installation height of only 1.7 mm. They can be integrated perfectly. And can easily be adjusted from a distance via an external amplifier.
Balluff's micro-optic MICROmote photoelectric sensors can be integrated directly into the end effector and guarantee high-precision wafer detection. Small sensing heads and "wired fibers" allow mounting in space limited locations with no minimum bending radius like conventional fiber optics. The remote amplifiers have multiple teach options that can solve the most difficult applications and a variety of outputs that makes integration into control systems quick and easy.
Balluff's magnetically coded position and angle measurement systems can ensure precise positioning so that wafers are in the correct position during manufacturing. Available in either linear or rotary configurations, the sensing tape and head are incredibly compact providing versatility in mounting. In addition, output signals are available as either incremental or absolute supporting high dynamic position or angle measurement tasks in real-time systems.
Balluff's micro-optic MICROmote photoelectric sensors can easily solve these critical applications. With sensing heads as small as 2mm and "wired fibers" with no minimum bending radius these miniature sensors can easily fit in the smallest of spaces. The remote amplifiers have multiple teach options that can solve the most difficult applications and a variety of outputs that makes integration into control systems quick and easy.
Balluff's miniature inductive sensors are easy to install and can be fully integrated in space limited assemblies such as linear slides, valves and actuators. As a result, position sensing is now possible where there was never before space for a sensor resulting in assemblies being reduced in size. Their extremely low mass enables sudden acceleration and deceleration on highly dynamic, fast-moving equipment without adding excessive inertial load.