Wafer handling
Wafer processing

Reliable wafer presence detection

Balluff sensors ensure that wafers are reliably detected so that they can be transported through every process step during manufacturing. With precise presence checking, position sensing and position detection, the sensors ensure that the wafers are transported smoothly from lithography to dry etching and finally to cleaning. Particularly small form factors also enable integration of the sensors into the robot end effector.

Application examples

Wafer presence verification
Wafter detection integrated in the end effector
Linear position detection
FOUP presence verification
Position detection with inductive sensors