We assist in process security
We assist in process security

We assist in process security

Sensors from Balluff with their extraordinary design features let you use them directly in a vacuum. For example during alignment on the fly when the wafer is centered in the vacuum lock or when you need to check it for presence.

We offer thread-in versions with a sealing function as well as sensors for installation directly in high vacuum. Their signals are reliably brought out through electrical cables via a cable fitting. And take special note: Since we use outgassing-optimized materials for the sensor, your process remains secure. If requested we can also produce the sensors in materials you specify.

Application examples

  • Centering wafers

    Centering wafers

    The solution

    You can reliably ensure alignment of the wafer on-the-fly using two Micromote through-beam sensors. Their high-precision signals make it possible to calculate the offset for the ideal line when the switching for both through-beam sensors is not simultaneous. Due to our Microspot technology, you can correct the wafer, since it precisely detects the sharp wafer edges.

    The features

    • Extremely focused LED light spot with outstanding homogeneity
    • Smallest, space-saving form factors
    Centering wafers
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    Industry team

    Do you have questions? Would you like a consultation? Our industry team looks forward to hearing from you.

  • Detecting wafer presence

    Detecting wafer presence

    The solution

    To ensure a reliable process you monitor presence of a wafer or carrier using our outgassing-optimized diffuse sensors. The infrared sensors with external amplifier are suited for use in a vacuum. Their ultra-flat form factor just 1.7 mm high with small vulnerability area are perfect for the limited space in a vacuum chamber.

    The features

      • Ultra-flat installation height saves space
      • No dead zone
      • Highly rugged stainless steel housing
      Detecting wafer presence
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      Industry team

      Do you have questions? Would you like a consultation? Our industry team looks forward to hearing from you.

    • Checking wafer presence

      Checking wafer presence

      The solution

      Our photoelectric sensors with separate electronics use special optics with a small light spot to detect the presence of a wafer or carrier through a viewing aperture. Simply thread the vacuum compatible diffuse sensor with stainless steel housing into your process chamber. The chamber is then sealed and no cable feedthrough is needed.

      The features

      • Micro-optics with small light spot
      • Rugged stainless steel housing with sealing function
      • for vacuum applications up to 1 × 10–9 mbar
      Checking wafer presence
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      Industry team

      Do you have questions? Would you like a consultation? Our industry team looks forward to hearing from you.