Presence checking through a housing channel on the vacuum chamber

Presence checking through a housing channel on the vacuum chamber

Reliable wafer detection - even in extremely tight conditions

The solution

Balluff BOH optoelectronic sensors make it possible to reliably check the presence of wafers, even through the narrow housing channel on the vacuum chamber. They have micro-optics with a small light spot. We implement the sealing function based on your individual design specifications.

The features

  • Micro-optics with small light spot
  • Rugged stainless steel housing with sealing function according to individual design specifications
  • For vacuum applications down to 1x10-9 mbar
  • Simple long-distance adjustment thanks to external amplifier
Reliable wafer detection - even in extremely tight conditions
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Industry team
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