Reliable wafer processing – step by step
Our sensors ensure that wafers are reliably transported through every single one of the sensitive process steps while they are processed. With precise presence checking, position sensing and position detection, the sensors ensure that the wafers are transported smoothly from lithography to dry etching and finally to cleaning. Particularly small form factors also enable integration of the sensors into the robot. This allows us to guarantee reliable wafer detection, even in tight installation spaces.
Our BCS capacitive sensors have a very compact installation height of 2.5 mm with a diameter of 18 mm. This makes it possible to perfectly integrate them. Long-distance adjustment is possible thanks to the external amplifier.
Our BOH optoelectronic sensors have an extremely compact installation height of only 1.7 mm. They can be integrated perfectly. And can easily be adjusted from a distance via an external amplifier.
Our BOH optoelectronic sensors are integrated directly into the end effector and guarantee high-precision wafer detection there. This is above all ensured by the light barrier with micro-optics as well as the highly exact light spot.
Our BML magnetically encoded displacement transducers and angle measurement systems are the perfect solution for linear position detection: The measurement system measures fast and highly precisely, with a resolution of up to 1 μm and system accuracy of up to +/–7 μm. The system operates without contact and therefore entirely wear-free.
Our BOH optoelectronic sensors are equipped with LED technology and individual focus and are optionally available as a light barrier or diffuse sensor. Due to their particularly flat design, you can integrate them into your process chain to save space.
With our BES inductive NAMUR sensors you are on the safe side when processing wafers: The sensor follows the NAMUR recommendations and reliably detects cable breaks and short-circuits. Due to its low current consumption, it only generates minimal self-heating. Continuous use is therefore possible without any problems.