Exact positioning without contact
Balluff systems support precise and efficient carrier handling – whether it is an FOUP or SMIF pod. When the carrier is transported fully automatically our systems monitor the movements of the AMHS. With extreme reliability, both over short distances with RGVs or long distances with OHVs.
At the same time our non-contact systems provide exact positioning. Your wafers are reliably transported for each and every processing step. Abrasion and splitting are not a problem.
Balluff systems also provide consistent traceability. They ensure that the carrier position is documented in real time.
To detect the presence of a carrier on a load port, our space-saving through-beam and diffuse sensors are ideal. Their especially flat construction allows them to be ideally integrated. The minimal installation surface on the load port which is often no larger than the transport box, can then be simply maintained. This ensures that the machine only opens when a carrier has docked.
To be able to track the carrier positions in an AMHS system, you equip the carrier with 2D codes for optical reading. Our cameras read data matrix, QR and barcodes, so that every movement of the transport carriers is checked. And you always know exactly where the carriers are located.
When continuous position detection of the transport vehicles is called for, our magnetic encoder systems keep you on the safe side. These can be individually configured for your measuring range. They are highly precise, so that your carriers are transferred to the load ports smoothly and accurately.
We provide many options for you to monitor the end position of your vehicles that transport the carriers. Depending on the requirement we recommend inductive, capacitive or photoelectric sensors. These allow you to verify that the AMHS is correctly located and your carriers can be precisely positioned at the load port.