Semiconductor Industry > Vacuum application
We assist in process security

We assist in process security

Sensors from Balluff with their extraordinary design features let you use them directly in a vacuum. For example during alignment on the fly when the wafer is centered in the vacuum lock or when you need to check it for presence.

We offer thread-in versions with a sealing function as well as sensors for installation directly in high vacuum. Their signals are reliably brought out through electrical cables via a cable fitting. And take special note: Since we use outgassing-optimized materials for the sensor, your process remains secure. If requested we can also produce the sensors in materials you specify.

Application examples

Centering wafers
Detecting wafer presence
Checking wafer presence