Wafer centering in the load lock

Photoelectric sensors for load lock

The solution

Balluff's micro-optic MICROmote photoelectric sensors provide a solution for wafer centering. They are available in a screw-in version made of rugged stainless steel housing that will seal to withstand high vacuums. In addition, sensing heads can be customized to fit most applications that are extraordinary small with incorporated vacuum rated cables. These sensors utilize our standard remote amplifiers that provide multiple operating features and various outputs.

The features

  • Rugged stainless steel housing with sealing function
  • Micro-optics provide minimal attack surface with highest optical performance
  • For vacuum applications down to 1x10-9 mbar
Reference light barrier for wafer centering in the load lock
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