Wafter detection integrated in the end effector

Precise wafer detection with photoelectrics

The solution

Balluff's micro-optic MICROmote photoelectric sensors can be integrated directly into the end effector and guarantee high-precision wafer detection. Small sensing heads and "wired fibers" allow mounting in space limited locations with no minimum bending radius like conventional fiber optics. The remote amplifiers have multiple teach options that can solve the most difficult applications and a variety of outputs that makes integration into control systems quick and easy.

The features

  • Sensor heads with small footprint for space limited applications
  • Precise switch points for high accuracy
  • Focused narrow light beams
Wafter detection integrated in the end effector
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