Vacuum applications
Vacuum applications

Precision solutions for ultra high vacuum applications

Balluff's line of micro-optic MICROmote sensors are designed for precise sensing solutions even in high and ultra-high vacuum applications. Two fundamental sensor types are available, either installation in the vacuum chamber wall or for complete installation in the UHV environment. MICROmote sensors with separate amplifiers are ideal for optical applications in high vacuum. The sensor heads are tiny and can be shaped according to nearly any user specifications.

Application examples

  • Wafer centering in the load lock

    Photoelectric sensors for load lock

    The solution

    Balluff's micro-optic MICROmote photoelectric sensors provide a solution for wafer centering. They are available in a screw-in version made of rugged stainless steel housing that will seal to withstand high vacuums. In addition, sensing heads can be customized to fit most applications that are extraordinary small with incorporated vacuum rated cables. These sensors utilize our standard remote amplifiers that provide multiple operating features and various outputs.

    The features

    • Rugged stainless steel housing with sealing function
    • Micro-optics provide minimal attack surface with highest optical performance
    • For vacuum applications down to 1x10-9 mbar
    Reference light barrier for wafer centering in the load lock
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    Have any questions? Please give us a call or send us an email. We look forward to hearing from you.

  • Presence checking through a housing channel in the vacuum chamber

    Reliable wafer detection in space limited areas

    The solution

    Balluff optoelectronic sensors make it possible reliably check the presence of wafers, even through the narrow housing channel on the vacuum chamber. They have micro-optics with a small light spot. We implement the sealing function based on your individual design specifications.

    The features

    • Micro-optics with small light spot
    • Rugged stainless steel housing with sealing function according to individual design specifications
    • For vacuum applications down to 1x10-9 mbar
    • Simple long-distance adjustment thanks to external amplifier
    Reliable wafer detection - even in extremely tight conditions
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    Contact us

    Have any questions? Please give us a call or send us an email. We look forward to hearing from you.

  • Presence and position detection of wafers on blade

    Photoelectric sensors for load lock

    The solution

    Our BOH optoelectronic sensors reliably detect the presence and position of the wafers "on blade". Without a dead zone. Their ultra-flat installation height permits space-saving integration into your system. Balluff MICROmote sensors make it possible to reliably check for the presence of wafers in tight space limited areas of the vacuum chamber. The patented micro-optics sensors produce a small focused light spot with no dead zone in an ultra-flat design as thin as 1.7mm. The sensing heads are housed in robust metal housings with sealing according to application design specifications.

    The features

    • Space-saving ultra-flat design (1.7 mm)
    • No dead zone
    • PTFE cable optimized for outgassing
    • For vacuum applications down to 1x10-9 mbar
    Presence and position detection of wafers "on blade"
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    Contact us

    Have any questions? Please give us a call or send us an email. We look forward to hearing from you.