Exact positioning without contact
Exact positioning without contact

Exact positioning without contact

Balluff systems support precise and efficient carrier handling – whether it is an FOUP or SMIF pod. When the carrier is transported fully automatically our systems monitor the movements of the AMHS. With extreme reliability, both over short distances with RGVs or long distances with OHVs.

At the same time our non-contact systems provide exact positioning. Your wafers are reliably transported for each and every processing step. Abrasion and splitting are not a problem.

Balluff systems also provide consistent traceability. They ensure that the carrier position is documented in real time.

Application examples

  • Checking for carrier presence

    Checking for carrier presence

    The solution

    To detect the presence of a carrier on a load port, our space-saving through-beam and diffuse sensors are ideal. Their especially flat construction allows them to be ideally integrated. The minimal installation surface on the load port which is often no larger than the transport box, can then be simply maintained. This ensures that the machine only opens when a carrier has docked.

    The features

      • Very flat construction
      • Space-saving
      • Individual focus
      Checking for carrier presence
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    • Reliable carrier tracking

      Reliable carrier tracking

      The solution

      To be able to track the carrier positions in an AMHS system, you equip the carrier with 2D codes for optical reading. Our cameras read data matrix, QR and barcodes, so that every movement of the transport carriers is checked. And you always know exactly where the carriers are located.

      The features

      • Easy to integrate, intuitive and simple to operate
      • All the data are available at a central location
      • Minimal data load, since mass data can be decoupled from the process network
      Reliable carrier tracking
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    • Continual detection of the AMHS position

      Continual detection of the AMHS position

      The solution

      When continuous position detection of the transport vehicles is called for, our magnetic encoder systems keep you on the safe side. These can be individually configured for your measuring range. They are highly precise, so that your carriers are transferred to the load ports smoothly and accurately.

      The features

      • Non-contacting measuring principle, i.e. wear-free
      • Extremely reliable and highly precise
      • Versatile: Magnetic tape can be trimmed up to 48 m
      Continual detection of the AMHS position
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      Industry team

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    • Checking end position of the AMHS

      Checking end position of the AMHS

      The solution

      We provide many options for you to monitor the end position of your vehicles that transport the carriers. Depending on the requirement we recommend inductive, capacitive or photoelectric sensors. These allow you to verify that the AMHS is correctly located and your carriers can be precisely positioned at the load port.

      The features

      • Non-contact, i.e. wear-free
      • Efficiently handle any requirements with technical versatility
      Checking end position of the AMHS
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      Industry team

      Do you have questions? Would you like a consultation? Our industry team looks forward to hearing from you.