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Wafer processing

Wafer processing

Reliable processing in chemical surroundings
Reliable processing in chemical surroundings

Reliable processing in chemical surroundings

To meet the special challenges of semiconductor production, Balluff offers you optimal solutions for processes in wet chemistry. Special PTFE housings let you monitor levels – such as when etching, cleaning the wafers or coating and developing in lithography. Our temperature sensors then ensure that the process temperature is correct. Because these contacting sensors let you reliably monitor temperatures in wafer processing.

With our sensors you also control the valve stroke, so that you can produce homogeneous and ideal coats in deposition.

Application examples

  • Non-contact detection of levels through the container wall

    Non-contact detection of levels through the container wall

    The solution

    In wet chemistry you can ensure a frictionless process chain by using our capacitive sensors to verify the ideal level for acid, base and ultrapure water tanks. These reliably detect the level through up to 10 mm thick glass and plastic vessel walls. For highly conductive media such as acids, use our capacitive high-end sensors, which also mask out foam and build-up.

    The features

      • For acids, bases, ultrapure water and slurry
      • Without by-passes
      Non-contact detection of levels through the container wall
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    • Monitor levels without contact on by-pass tubes

      Monitor levels without contact on by-pass tubes

      The solution

      You can also prevent overflow of tanks with aggressive chemical contents or too low a level by monitoring levels with the help of by-pass tubes. Install our compact capacitive sensors on the by-pass tube using cable ties. This is simple and inexpensive. To compensate for foam and build-up there are high-end versions for you which reliably detect highly conductive media such as lyes.

      The features

      • For acids, bases, ultrapure water and slurry
      • Smart Level technology for foam and build-up compensation
      Monitor levels without contact on by-pass tubes
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    • Detect process fluids with media contact

      Detect process fluids with media contact

      The solution

      When the container wall won’t allow detection from the outside, our capacitive sensors in the PTFE housing are the right choice. These detect the level of highly conductive media such as acids and bases directly in the process fluid. This means for example that etching or application of a resist, developing after lithography, or chemical-mechanical polishing and cleaning of the wafer can begin as planned.

      The features

      • PTFE housing for high chemical resistance
      • For acids, bases, ultrapure water and slurry
      • Smart level technology for foam and build-up compensation
      Detect process fluids with media contact
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    • Continuously monitor the level without contact

      Continuously monitor the level without contact

      The solution

      Do you need to know at all times what the liquid level is? No problem with our self-adhesive capacitive sensor heads with amplifier: Levels can be continuously monitored, so that you can detect a minimum or maximum value violation as well as levels over the entire range with just one sensor. Hugely practical: You can trim the flexible sensor head to the required shape and size and simply stick it on the container wall.

      The features

      • Handle both continuous measurement and min. and max. level detection
      • Integrated adhesive surface
      • Generous detection range from 108 up to 850 mm
      Continuously monitor the level without contact
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    • Directly monitor leakage

      Directly monitor leakage

      The solution

      Our super-compact capacitive sensors ensure that even the slightest leak amount is reliably detected. Using the provided holder simply attach the sensor at a 2 mm distance on the base of a tool and then just set it. In the worst case, if for example aggressive chemicals such as liquid acids escape, appropriate measures can be immediately taken.

      The features

      • Mounting holder supplied
      • Detect even the smallest amounts
      • Reliable detection of various chemicals
      Directly monitor leakage
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    • Get the wafer temperature at each process step

      Get the wafer temperature at each process step

      The solution

      Our media-contacting temperature sensors help you maintain the heat level of your process media in temperature-controlled processes. And they can do it in liquid or gaseous media. You can continuously monitor critical process states such as temperature limits. However you choose to use them, these sensors will contribute greatly to your process security.

      The features

      • Threaded for simple installation
      • Measure temperature directly or gaseous media
      • Compact form factors
      Get the wafer temperature at each process step
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    • Reliably monitor flow valves

      Reliably monitor flow valves

      The solution

      When the regular flow of a medium into the process chamber is controlled by a valve, you should be able to truly rely on the valve. After all, the flow contributes to a high-quality process. Which is why you should monitor the valve using our inductive sensors. These are rugged and available in small form factors such as M5, so that they can be easily integrated into the valve. For great reliability.

      The features

      • Small form factors for easy integration
      • LED visible after installation on the back end of the sensor
      • No external amplifier necessary
      Reliably monitor flow valves
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      Industry team

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