FOUP presence verification

FOUP presence verification

Precise reliable detection

The solution

Balluff's micro-optic MICROmote photoelectric sensors can easily solve these critical applications. With sensing heads as small as 2mm and "wired fibers" with no minimum bending radius these miniature sensors can easily fit in the smallest of spaces. The remote amplifiers have multiple teach options that can solve the most difficult applications and a variety of outputs that makes integration into control systems quick and easy.

The features

  • MICROmote sensing heads provide a better alternative to fiber optic sensors
  • Sensing beam angle and shape are designed for accurate presence verification
  • Small-scale sensing heads provides more mounting solutions
FOUP presence check with LED technology
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> Solutions for the Semiconductor Industry [PDF]
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