Linear position detection

Linear position detection

Measurement with maximum precision and speed

The solution

Balluff's magnetically coded position and angle measurement systems can ensure precise positioning so that wafers are in the correct position during manufacturing. Available in either linear or rotary configurations, the sensing tape and head are incredibly compact providing versatility in mounting. In addition, output signals are available as either incremental or absolute supporting high dynamic position or angle measurement tasks in real-time systems.

The features

  • Very accurate, up to ± 7 µm with resolutions down to 1 µm
  • Very fast, speeds up to 20 m/sec
  • Location is always known with absolute output signal
Maximum precision and speed in wafer processing
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> Solutions for the Semiconductor Industry [PDF]
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