Presence checking through a housing channel in the vacuum chamber

Presence checking through a housing channel in the vacuum chamber

Reliable wafer detection in space limited areas

The solution

Balluff optoelectronic sensors make it possible reliably check the presence of wafers, even through the narrow housing channel on the vacuum chamber. They have micro-optics with a small light spot. We implement the sealing function based on your individual design specifications.

The features

  • Micro-optics with small light spot
  • Rugged stainless steel housing with sealing function according to individual design specifications
  • For vacuum applications down to 1x10-9 mbar
  • Simple long-distance adjustment thanks to external amplifier
Reliable wafer detection - even in extremely tight conditions
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> Solutions for the Semiconductor Industry [PDF]
Contact us
Have any questions? Please give us a call or send us an email. We look forward to hearing from you.