Wafer presence verification

Wafer presence verification

Reliable options for wafer detection

The solution

Balluff capacitive sensors have a very compact height of 2.5 mm with a diameter of 10 mm. enabling them to be easily mounted into the robot end efector. Remote mounted amplifiers with multiple control options and the ability to remote teach makes integration quick and easy.

The features

  • Very compact installation height (2.5 mm, 10 mm diameter)
  • Stainless steel disk, sensing surface made of PTFE
  • Remote amplifier enables quick easy setup

The solution – variant 2

Our BOH optoelectronic sensors have an extremely compact installation height of only 1.7 mm. They can be integrated perfectly. And can easily be adjusted from a distance via an external amplifier.

The features

  • Very compact installation height (2.5 mm, 18 mm diameter)
  • Highly flexible, 3-wire single-ended cordset
  • Stainless steel housing
  • Infrared light
  • Vacuum-compatible
Wafer presence check
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> Solutions for the Semiconductor Industry [PDF]
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