Semiconductors > Liquid level and leak detection
Leak monitoring

Technologies to ensure proper chemistry levels

Balluff offers the broadest portfolio of sensors in the market to solve applications with technolgies that fit and perform reliably and consistently. These sensors can withstand and accuratley detect the harsh chemistries used in the semiconductor industry.

Balluff sensors not only precisely turn on when levels are present but they turn off when levels are absent. With a patented hybrid capacitive technology, detecting acids bases and other water-based conductive liquids is assured. These sensors ignore moisture, foaming, material buildup and filming. This ensures that your processes take place not only reliably, but also efficiently and economically.

Application examples

Indirect liquid level detection
Accurate noninvasive point level detection
Invasive or direct level detection
Fill level measurement in tanks
Leak monitoring of overflow chambers Liquid leakage monitoring