Precision solutions for ultra high vacuum applications
Balluff's line of micro-optic MICROmote sensors are designed for precise sensing solutions even in high and ultra-high vacuum applications. Two fundamental sensor types are available, either installation in the vacuum chamber wall or for complete installation in the UHV environment. MICROmote sensors with separate amplifiers are ideal for optical applications in high vacuum. The sensor heads are tiny and can be shaped according to nearly any user specifications.
Balluff's micro-optic MICROmote photoelectric sensors provide a solution for wafer centering. They are available in a screw-in version made of rugged stainless steel housing that will seal to withstand high vacuums. In addition, sensing heads can be customized to fit most applications that are extraordinary small with incorporated vacuum rated cables. These sensors utilize our standard remote amplifiers that provide multiple operating features and various outputs.
Balluff optoelectronic sensors make it possible reliably check the presence of wafers, even through the narrow housing channel on the vacuum chamber. They have micro-optics with a small light spot. We implement the sealing function based on your individual design specifications.
Our BOH optoelectronic sensors reliably detect the presence and position of the wafers "on blade". Without a dead zone. Their ultra-flat installation height permits space-saving integration into your system. Balluff MICROmote sensors make it possible to reliably check for the presence of wafers in tight space limited areas of the vacuum chamber. The patented micro-optics sensors produce a small focused light spot with no dead zone in an ultra-flat design as thin as 1.7mm. The sensing heads are housed in robust metal housings with sealing according to application design specifications.