Semiconductors > Sensing solutions for vacuum applications
Vacuum applications

Precision solutions for ultra high vacuum applications

Balluff's line of micro-optic MICROmote sensors are designed for precise sensing solutions even in high and ultra-high vacuum applications. Two fundamental sensor types are available, either installation in the vacuum chamber wall or for complete installation in the UHV environment. MICROmote sensors with separate amplifiers are ideal for optical applications in high vacuum. The sensor heads are tiny and can be shaped according to nearly any user specifications.

Application examples

Wafer centering in the load lock
Presence checking through a housing channel in the vacuum chamber
Presence and position detection of wafers on blade