Centering wafers
You can reliably ensure alignment of the wafer on-the-fly using two Micromote through-beam sensors. Their high-precision signals make it possible to calculate the offset for the ideal line when the switching for both through-beam sensors is not simultaneous. Due to our Microspot technology, you can correct the wafer, since it precisely detects the sharp wafer edges.
The features
- Extremely focused LED light spot with outstanding homogeneity
- Smallest, space-saving form factors
Downloads
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Industry brochure semiconductor industry