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Check for wafer presence on end-effectors

Check for wafer presence on end-effectors

Use our outgassing-optimized optical diffuse sensors to check the presence of the wafer on the end effector with absolute reliability, so that you no longer need to fear crashes. Our diffuse sensors can be perfectly integrated into the end effector, even if it is extremely thin. Because their installation height is just 1.7 mm.

The features

  • Extremely flat, perfect for the end effector
  • Outgassing optimized for the cleanroom!
  • Simple remote adjustment

Downloads

  • Industry brochure semiconductor industry