Reliable wafer mapping
Detect the edges – of just a few µm thick wafers – with absolute reliability. The extremely controlled and focused light spot from our Micromote sensors provide you with outstanding precision. Our Micromote sensors also ensure that full slots, double wafers or incorrectly positioned wafers are reliably detected at all times. Flexible cables and small form factors let you benefit from great freedom of design.
- Outstanding precision in the smallest space – minimal opening angle
- Can be adapted to a wide variety of end effectors
- Modular kit system – perfect for specific mechanical installation situations
Industry brochure semiconductor industry
Mapping Sensor – delivering precision in the smallest possible space