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Wafer pre-alignment

Wafer pre-alignment

Bring your wafers to the process chamber perfectly aligned by exactly positioning them in pre-aligner. We offer an outstanding solution for optical pre-aligners: a high-resolution light array with extraordinary homogeneity. Additionally, it lets you detect either notch or flat for precisely centering the wafer. Our light array is also ideal for integrating into your pre-aligner.

The features

  • Very precise red light laser: High-resolution and extremely homogeneous
  • Different light lengths for individual requirements
  • Intuitive operation

Related topics

Downloads

  • Industry brochure semiconductor industry