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Detect process fluids with media contact

Detect process fluids with media contact

When the container wall won’t allow detection from the outside, our capacitive sensors in the PTFE housing are the right choice. These detect the level of highly conductive media such as acids and bases directly in the process fluid. This means for example that etching or application of a resist, developing after lithography, or chemical-mechanical polishing and cleaning of the wafer can begin as planned.

The features

  • PTFE housing for high chemical resistance
  • For acids, bases, ultrapure water and slurry
  • Smart level technology for foam and build-up compensation

Downloads

  • Industry brochure semiconductor industry