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Get the wafer temperature at each process step

Get the wafer temperature at each process step

Our media-contacting temperature sensors help you maintain the heat level of your process media in temperature-controlled processes. And they can do it in liquid or gaseous media. You can continuously monitor critical process states such as temperature limits. However you choose to use them, these sensors will contribute greatly to your process security.

The features

  • Threaded for simple installation
  • Measure temperature directly or gaseous media
  • Compact form factors

Downloads

  • Industry brochure semiconductor industry