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Check for wafer presence on end-effectors

Check for wafer presence on end-effectors

You can also check for the presence of the wafer on the end effector using our capacitive sensors with PTFE coating. These detect ultra-thin wafers with outstanding reliability, even if they are sagging. Their installation height is just 2.5 mm to ensure perfect integration into the end effectors. The external amplifier makes remote adjustment easy.

The features

  • Extremely flat – just 2.5 mm
  • PTFE housing, also suitable for various surfaces
  • High precision in the smallest possible package

Downloads

  • Industry brochure semiconductor industry