Checking wafer presence
Our photoelectric sensors with separate electronics use special optics with a small light spot to detect the presence of a wafer or carrier through a viewing aperture. Simply thread the vacuum compatible diffuse sensor with stainless steel housing into your process chamber. The chamber is then sealed and no cable feedthrough is needed.
The features
- Micro-optics with small light spot
- Rugged stainless steel housing with sealing function
- for vacuum applications up to 1 × 10–9 mbar
Downloads
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Industry brochure semiconductor industry