Verifique a presença de wafer nos efetores finais
You can also check for the presence of the wafer on the end effector using our capacitive sensors with PTFE coating. These detect ultra-thin wafers with outstanding reliability, even if they are sagging. Their installation height is just 2.5 mm to ensure perfect integration into the end effectors. The external amplifier makes remote adjustment easy.
As características
- Extremamente fino – apenas 2.5 mm
- Corpo em PTFE, também adequado para várias superfícies
- Alta precisão no menor pacote possível
Downloads
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Industry brochure semiconductor industry